Banner for LabNotes
From Lab Notes
Contact Information
Forest Products Laboratory
One Gifford Pinchot Drive
Madison, WI 53726-2398
Phone: (608) 231-9200
Fax: (608) 231-9592
Email

 

You are here: FPL Home  / Information Products & Services  / Publications

Requested Product

Title: Effect of water uptake on the fracture behavior of low-k organosilicate glass

Source: Journal of Vacuum Science & Technology A 32, 2014; pp. 031512 1-8.

Author(s)Guo, Xiangyu; Jakes, Joseph E.; Banna, Samer; Nishi, Yoshio; Shohet, J. Leon

Publication Year: 2014  View PDF »

Category: Journal Articles
Associated Research Project(s):   FPL-4707-3B

Abstract: Water uptake in porous low-k dielectrics has become a significant challenge for both back-end-of-the-line integration and circuit reliability. This work examines the effects of water uptake on the fracture behavior of nanoporous low-k organosilicate glass. By using annealing dehydration and humidity conditioning, the roles of different water types and their concentrations are analyzed in detail. For as-deposited SiCOH films, annealing dehydration can enhance the resistance to crack occurrence, and these enhancements can be offset by higher humidity conditioning. It was found that the film-cracking threshold can be lowered by in-diffused water in the film as well as by water at the SiCOH/subtract interface. This occurs because the water decreases the film fracture energy and adhesion energy, respectively. By conditioning at high humidity, the variation of the film cracking threshold agrees well with the behavior of the film hardness and modulus of elasticity as a function of relative humidity. The crack morphologies of low-k porous films are also implicitly related to water uptake in the materials. Film cracking thresholds and crack morphologies of UV-cured low-k materials exhibit a weaker dependence on the water uptake, indicating a low degree of hydrophilicity of the SiCOH film after UV curing, which corroborates the previous results. Furthermore, by measuring the surface crack length, the material–fracture toughness can be found. The results demonstrate that neither annealing dehydration nor water uptake have significant effects on fracture toughness of as-deposited SiCOH, while for UV-cured SiCOH, annealing enhances the film-fracture toughness.

Keywords: nanoindentation; thin film; humidity

Publication Review Process: Formally Refereed

File size: 1,771 kb(s)

Date posted: 09/08/2014

This publication is also viewable on Treesearch:  view
RITS Product ID: 68691
Current FPL Scientist associated with this product
Jakes, Joseph
Research Materials Engineer
  

Additional items that might interest you
View the video celebrating FPL's 100 years of public service in 2010, from the producers of the Greatest Good....view

Research Highlights from FPL....view

Termite Eradication: A search for the Holy Grail.... view

Moisture Management in Residential Construction Series videos...view

Wood Floor Systems in Residential Construction Series videos....view
- FPL's Mission and Strategic Plan -

FPL's mission is to identify and conduct innovative wood and fiber utilization research that contributes to conservation and productivity of the forest resource, thereby sustaining forests, the economy, and quality of life. ... ..more »

- FPL Research Emphasis Areas -
Advanced Composites

As an integral part of the FPL mission, we improve the long-term sustainability of our Nation's forests by creating valuable composite products from biobased materials ... ..more »


Advanced Structures

The FPL has been in the forefront of wood-frame housing research since 1910 and has long been recognized as a world leader in such housing-related areas as engineered wood ... ..more »


Forest Biorefinery

We all know the compelling reasons that the United States needs to reduce its dependence on fossil fuels. Historically, the greatest increases in energy demand have been for transportation fuels ... ..more »


Nanotechnology

A leader in wood products research for over a century, the FPL is positioning itself to become the lead Federal research facility for the application of nanotechnology in forest products ... more »


Woody Biomass Utilization

Forests in the United States contain a substantial amount of small-diameter, overstocked, and underutilized material.FPL research projects are exploring the potential of the small-diameter ... ..more »